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Glass Wafer
Property
4 inch 5 inch 6 inch 8 inch
Diameter
100 ± 0.2 mm 125 ± 0.2 mm 150 ± 0.2 mm 200 ± 0.2 mm
Flat
32.5 ± 0.25 mm 42.5 ± 0.25 mm 57.5 ± 0.25 mm 57.5 ± 0.25 mm
Thickness
500 ± 20 ㎛ 625 ± 20 ㎛ 675 ± 20 ㎛ 725 ± 20 ㎛
Parallelism (Delta D)
< 30 ㎛ / 100 mm
Roughness (Ra)
Ra ≤ 1 nm
Warp
≤ 0.1 / 100mm
TTV
≤ 10 ㎛
Scratch/Dig.
60/40 ㎛
Chip
≥ 0.5 mm : 0
Polish
SSP (Single Side Polished) / DSP (Double Side Polished)
Shape
Round, 1 Flat, 2 Flat
Edge Form
Straight, Chamfer
Material
Sodalime, E-2000, Pyrex, Borofloat, Borosilicate (D263T), Quartz, and etc.
Remarks
All specifications above can be customized upon your request
Glass Plate
Property
50 x 50 76 x 76 100 x 100 127 x 127
Width
50 ± 0.2 mm 76 ± 0.2 mm 100 ± 0.2 mm 127 ± 0.2 mm
Length
50 ± 0.2 mm 76 ± 0.2 mm 100 ± 0.2 mm 127 ± 0.2 mm
Thickness
550 ± 20 ㎛, 400 ± 20 ㎛, 300 ± 20 ㎛
Corner (Chamfer)
2, 3, 5 ± 0.5 mm
Pararellelism (Delta D)
< 30 / 100 mm
Roughness (Ra)
Ra ≤ 1 nm
TTV
≤ 10 ㎛
Scratch/Dig.
40/20 ㎛
Chip
≥ 0.5 mm : 0
Polish
DSP (Double Side Polished)
Shape
Round, 1 Flat, 2 Flat
Edge Form
Straight, Chamfer
Material
Sodalime, E-2000, Pyrex, Borofloat, Borosilicate (D263T), Quartz, and etc.
Remarks
All specifications above can be customized upon your request