50.8 mm ± 0.38 mm (2.000" ± 0.015") | |||||||||
330 / 430 ±25 ㎛ | |||||||||
On axis : <0001> ± 0.5˚ Off axis : 1.0 / 3.5 / 4.0 / 8.0 toward<11-20> ± 0.5˚ |
|||||||||
(10-10) ± 5.0˚ | |||||||||
Silicon face up : 90° cw. from Prime flat ± 5° | |||||||||
≤ 5cm-2 | |||||||||
|
|
||||||||
Product / Research / Dummy |
76.2 mm ± 0.38 mm (3.000" ± 0.015") | |||||||||
350 ± 25 ㎛ | |||||||||
On axis : <0001> ± 0.5˚ for 6H-N/4H-N/6H-SI Off axis : 4.0 toward <11-20> ± 0.5˚ for 4H-N/4H |
|||||||||
(10-10) ± 5.0˚ | |||||||||
Silicon face up : 90° cw. from Prime flat ± 5° | |||||||||
≤ 5cm-2 | |||||||||
|
|
||||||||
Product / Research / Dummy |
100.0 mm ± 0.50 mm (4.000" ± 0.015") | |||||||||
350 ± 2 ㎛ | |||||||||
Off axis : 4.0 toward <11-20> ± 0.5˚ | |||||||||
(10-10) ± 5.0˚ | |||||||||
Silicon face up : 90° cw. from Prime flat ± 5° | |||||||||
≤ 5cm-2 | |||||||||
|
|
||||||||
Product / Research / Dummy |