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Name of State
Filing date /
Registration date
Patent Number
Polishing Appratus of Wafer
Korea
2013.03.14
2014.05.30
 No.10-1404678
Method of Wafer Polishing
Korea
2004.05.19
2006.01.09
 No.0543569
Method For Producing Virtual Gallium Nitirde Epitaxial Wafer and Vertical Conduction Device
Korea
2006.09.14
2007.10.25
 No.10-0772021
Substrate Structure for Semiconductor made of Nitride-based Compound and Prodcution Method
Korea
2006.09.22
2008.01.03
 No.10-0793443