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AIN wafer
Property
2 inch
4 inch
6 inch
8 inch
12 inch
Diameter
50.8 ± 0.1 mm
100 ± 0.1 mm
150 ± 0.2 mm
200 ± 0.2 mm
300 ± 0.2 mm
Thickness
Upon Request
Upon Request
550 ± 20 ㎛
650 ± 20 ㎛
700 ± 50 ㎛
Roughness
Ra
≤
0.1㎛ : Mirror polish, Ra
≤
0.8 ㎛ : Standard
Warp
≤
0.1 mm
≤
0.1 mm
≤
0.3 mm
≤
0.3 mm
≤
0.5 mm
Flat or Notch
Upon Request
Type
Various size of plate types are available
Remarks
All specifications above can be customized upon your request